Reactive magnetron sputtering yog cov txheej txheem paub tab kom tso cov txheej txheem nyias nyias ntawm cov gamut ntawm cov substrates ua txheej sab saum toj lossis ua cov txheej nruab nrab hauv txheej txheej txheej. Lub Scope ntawm "nyias" yog nyob ntawm ob peb nanometers mus txog ob peb micrometers.
Vim li cas lub tshuab hluav taws xob magnetron?
Magnetron sputtering yog txheej txheem kev sib tsoo ntawm qhov xwm txheej thiab cov hom phiaj… Magnetron sputtering nce cov ntshav plasma los ntawm kev qhia cov hlau nplaum ntawm qhov chaw ntawm lub hom phiaj cathode thiab siv cov kev txwv ntawm lub magnetic teb ntawm tus nqi hais kom nce tus nqi sputtering.
txhais li cas los ntawm reactive sputtering?
Reactive sputtering yog tus txheej txheem uas tso cai rau cov khoom sib xyaw ua ke los ntawm kev qhia cov roj reactive (feem ntau cov pa oxygen lossis nitrogen) rau hauv cov ntshav uas feem ntau yog tsim los ntawm cov roj inert xws li argon (feem ntau), xenon, lossis krypton.
Magnetron sputter ua haujlwm li cas?
Magnetron sputtering yog cov cuab yeej tso tawm uas muaj cov roj ntsha roj uas tsim tawm thiab kaw rau hauv qhov chaw uas muaj cov khoom yuav tsum tau tso - 'lub hom phiaj'. … Cov kev sib tsoo no ua rau an electrostatic repulsion uas 'knock tawm' electrons los ntawm sputtering gas atoms, ua rau ionization.
Vim li cas RF sputter?
RF lossis Xov Tooj Cua Frequency Sputtering yog cov txheej txheem koom nrog kev hloov hluav taws xob muaj peev xwm ntawm tam sim no nyob rau hauv lub tshuab nqus tsev ib puag ncig ntawm xov tooj cua zaus kom tsis txhob muaj nqi tsim los ntawm qee hom sputtering cov ntaub ntawv, uas dhau sijhawm tuaj yeem ua rau arcing rau hauv cov ntshav uas ua rau cov tee dej…
